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MATERIAL SAFETY DATA SHEET FOR POSITIVE PHOTO RESIST PC197
Chemtrec No. (800) 424-9300
PRODUCT NAME: PC197
PRODUCT CLASS: Photoresist
EFFECTIVE DATE: 3/25/92
ACGIH TLV OSHA PEL
COMPONENT CAS # WEIGHT% PPM(mq/m3) PPM(mq/m3)
2-ethoxyethyl acetate 111-15-9 60 5(27) 100
n-butyl acetate 123-86-4 7 150(710) 150
xylene 1330-20-7 7 100(435) 100
toluene 108-88-3 5 100(375) 200
Novolak resins and
photoactive compounds * 2 1 N . A. N . A.
CARCINOGENIC STATUS: Not considered carcinogenic BV NTP. IARC and OSHA.
EXPOSURE LIMITS: Not established. Keep vapor concentrations below component TLV's.
ROUTES OF ENTRY: Inhalation of mists or vapors, eye and skin contact, ingestion, skin absorption.
ACUTE EFFECTS: Eye and skin contact can cause irritation, itching, redness, tearing, burning and inflammation. Inhalation, ingestion and skin absorption can cause headache, nausea, vomiting, dizziness, weakness, drowsiness, narcosis and exhaustion. Ingestion of large quantities can cause kidney and liver damage.
CHRONIC EFFECTS: Prolonged, repeated contact with skin can cause absorption of harmful amounts of material. Prolonged, repeated exposure can cause chronic effects with symptoms as described above and other effects including anemia, hematological effects, damage to bone marrow, kidney' liver and testes.
NOTE: When laboratory animals have been exposed to 2-ethoxyethyl acetate birth defects and adverse effects on pregnancy have been observed.
EMERGENCY FIRST AID PROCEDURES
INGESTION: Contact physician at once.
EYE CONTACT: Flush immediately with plenty of water for at least 1S minutes. Contact physician at once.
SKIN CONTACT: Flush immediately with plenty of water for at least 15 minutes. Remove contaminated clothing. Contact physician. Wash clothing before reuse.
INHALATION: Move into fresh air. If not breathing, give artificial respiration. If breathing is difficult, give oxygen. Contact a physician at once.
NOTE TO PHYSICIAN: There is no specific antidote. Treatment of overexposure should be directed at the control of symptoms and the clinical condition.
APPEARANCE AND ODOR: Red/amber viscous solution with slightly sweet odor.
% VOLATILE BY WEIGHT: 79%
EVAPORATION RATE: Slower than ether
VAPOR DENSITY(AIR=1): Heavier than air
SOLUBILITY IN WATER: Not soluble
BOILING RANGE: Begins ca. 120° C
VAPOR PRESSURE( MMHg )
2-ethoxyethyl acetate: 1.2mm at 20° C
n-butyl acetate: 15mm at 25° C
xylene: 6mm at 20° C
toluene: 6mm at 20. C
FIRE AND EXPLOSION HAZARD DATA
FLASH POINT: 94° F
METHOD USED: PMCC
LOWER EXPLOSION LIMIT
2-ethoxyethyl acetate: 1.7%
n-butyl acetate: 1.7%
EXTINGUISHING MEDIA: Alcohol foam, carbon dioxide, dry chemical
SPECIAL FIRE FIGHTING PROCEDURES: Use normal procedures for flammable liquid fires. Containers near fire may be cooled with water.
UNUSUAL FIRE AND EXPLOSION HAZARDS: Pressure may build up in closed containers. This is accelerated by heat with possible liberation of combustible vapors.
CONDITIONS TO AVOID: Heat, sparks, flame
DECOMPOSITION PRODUCTS: Details unknown. May emit toxic fumes if burned.
HAZARDOUS POLYMERIZATION: Will not occur.
Spill, Leak, And Disposal Procedures
ACTION TO TAKE FOR SPILL: Eliminate sources of ignition, provide adequate ventilation and suitable protective clothing. Collect with inert absorbent material and place in a suitable container for disposal.
Dispose of contaminated product and materials used in cleaning up spills and leaks in a manner approved for this material.
DISPOSAL: Due to the nature of this product, disposal of it, or residues therefrom should be made in compliance with federal, state and local environmental
It is your responsibility to verify that any recommended procedures comply with federal, state and local regulations for wastewater discharge.
Precautions For Safe Use And Handling
RESPIRATORY PROTECTION: The specific respirator selected must be based on the airborne concentration found in the workplace and must not exceed the working limits of the respirator. The respirator must be approved by the National Institute for Occupational Safety and Health for the substance of concern.
EYE PROTECTION: Chemical goggles.
PROTECTIVE CLOTHING: Chemical resistant gloves and suitable protective clothing to prevent skin contact.
WORK PRACTICES: Avoid skin contact. Practice good personal hygiene to prevent accidental exposure.
VENTILATION: Provide good general (mechanical) room ventilation. Special local exhaust ventilation is recommended at points where vapors can be released into the workplace air.
Special Precautions / Additional Information
PRECAUTIONS TO TAKE IN HANDLING AND STORAGE: CAUTION! Flammable liquid. Store in closed original container in a cool, dry area at 50‑70° F. Keep away from light, oxidants, heat and sources of ignition. Avoid storing longer than one year.
DOT PROPER SHIPPING NAME: Flammable liquids, N.O.S.
DOT HAZARD CLASSIFICATION: (3)
DOT HAZARD IDENTIFICATION NUMBER : UN 1993
TSCA STATUS: The products listed and their components have been manufactured in accordance with the inventory listing and premanufacture notice requirements of the Toxic Substance Control Act.
MA RIGHT TO KNOW LAW : All components have been checked for inclusion on the Massachusetts Substance List.
CALIFORNIA Proposition 65: This product contains 2-ethoxyethyl acetate, which has been found by the State of California to be a carcinogen or reproductive hazard.
HAZARD CATEGORIES UNDER CRITERIA OF SARA TITLE III RULES (40 CFR 370): Immediate, Delayed, Fire hazard
THIS PRODUCT CONTAINS THE FOLLOWING TOXIC CHEMICALS SUBJECT TO THE REPORTING REQUIREMENTS OF SECTION 313 OF THE EMERGENCY PLANNING AND COMMUNITY RIGHT-TO-KNOW ACT OF 1986 AND OF 40 CFR 372
CAS # Chemical Name Percent by Weight
1330-20-7 xylene 7
111-15-9 2-ethoxyethyl acetate 60
108-88-3 toluene 5
NA denotes no applicable information was found
THE DATA CONTAINED HEREIN IS BASED ON INFORMATION THAT INJECTORALL BELIEVES TO BE RELIABLE, BUT NO EXPRESSED OR IMPLIED WARRANTY IS MADE WITH REGARD TO THE ACCURACY OF SUCH DATA OR ITS SUITABILITY FOR A GIVEN SITUATION. SUCH DATA RELATES ONLY TO THE SPECIFIC PRODUCT DESCRIBED AND NOT TO SUCH PRODUCTS IN COMBINATION WITH ANY OTHER PRODUCT AND NO AGENT OF INJECTORALL IS AUTHORIZED TO VARY ANY OF SUCH DATA. INJECTORALL AND ITS AGENTS DISCLAIM ALL LIABILITY FOR ANY ACTION TAKEN OR FOREGONE ON RELIANCE UPON SUCH DATA.
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